Novellus Systems

SAN JOSE, California - - MicroLine(R) Technology Produces Extremely Flat Wafers to Meet Chip Manufacturing Lithography Requirements at 22nm And Beyond To address the challenges of wafer polishing at future technology nodes, Peter Wolters GmbH, a wholly-owned subsidiary of Novellus Systems (Nasdaq: NVLS), has recently developed advanced polishing technology for its MicroLine AC 1500-P3 and AC 2000-P3 double-sided silicon wafer polishing (DSP) systems that will meet the lithography requirements for semiconductor device manufacturing at 22nm and beyond.