Tsmc; Mapper
HSINCHU, Taiwan and DELFT, Netherlands, February 19, 2010 - Taiwan Semiconductor Manufacturing Company (TWSE: 2330, NYSE: TSM) and
MAPPER Lithography today revealed that a pre-alpha MAPPER tool located on
TSMC's Fab 12 GigaFab(TM) is repeatedly printing features previously
unachievable using current immersion lithography technology.