Tsmc; Mapper


HSINCHU, Taiwan and DELFT, Netherlands, February 19, 2010 - Taiwan Semiconductor Manufacturing Company (TWSE: 2330, NYSE: TSM) and MAPPER Lithography today revealed that a pre-alpha MAPPER tool located on TSMC's Fab 12 GigaFab(TM) is repeatedly printing features previously unachievable using current immersion lithography technology.
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