Edwards Expands Vacuum Pump Offering for Semiconductor Processing With New iXL120

CRAWLEY, WEST SUSSEX, England, July 12, 2010 - Edwards, a leading global supplier of vacuum and abatement equipment and
services, today introduced the iXL120, expanding its range of dry pumps for
use in semiconductor manufacturing processes. Designed for load lock and
other clean applications, the new iXL120 provides the fastest pump down in
its class and low energy consumption for high throughput and low cost of
ownership.

    (Photo: photos.prnewswire.com/prnh/20100712/NY33095 )
    (Photo: www.newscom.com/cgi-bin/prnh/20100712/NY33095 )

"With the introduction of this innovative new pump, Edwards dry pump
suite of products, which also include the iGX and iXH series, provide our
semiconductor customers with a complete range of vacuum solutions optimized
for their manufacturing process requirements," said Andy Mann, semiconductor
dry pump product manager at Edwards. "The iXL120's class-leading pumping
speed, combined with its low power consumption, small footprint and minimal
maintenance, help reduce its cost of ownership. Our pumps' Green Mode, in
which power consumption is reduced by up to 92 percent, helps improve both
cost of ownership and environmental impact."

With a peak pumping speed of 110m(3)/h, the iXL120 is 22 percent faster
than any other pump in its class (20 liter chamber). The average energy
consumption (power at 700T exhaust pressure) is only 550 W, one of the lowest
in its class.

The iXL120 is one of the smallest (450mm L x 230mm W x 280mm H) and
lightest (59 kg) pumps available for clean and loadlock applications. It is
small and light enough to be mounted on the process tool or within the fab's
waffle floor, helping to save valuable fab floor space.

Unlike most competing dry pumps, the iXL120 incorporates oil lubricated
precision bearings and timing gears. This reduces vibration during pump
operation, which is especially important when the pump is mounted on the
process tool. It is also more reliable and eliminates routine maintenance.

The new iXL120 pump includes a zero nitrogen purge option for processes
that do not use corrosive gases. The zero purge option eliminates the need to
provide nitrogen to the pump, simplifying operation and reducing operating
costs. The iXL120N includes a nitrogen purge for use where there is a risk of
corrosive gas carryover.

For further information about Edwards products please visit
www.edwardsvacuum.com.

About Edwards

Edwards is a leading global technology company supplying vacuum and
abatement equipment for the manufacture of semiconductors, flat panel
displays, LEDs and solar cells and is also a leader in vacuum technology for
industrial, scientific, process and R&D applications. The company employs
approximately 3,000 people worldwide and has its headquarters in Crawley, UK.
Edwards created the concept of the low-maintenance, cost-effective,
commercial oil-free 'dry' vacuum pump and offers a wide range of other
pumping technologies, and related products, supported by an international
sales and service organisation. For more information, please visit
www.edwardsvacuum.com.

Note to Editors:

A picture accompanying this release is available through the PA
Photowire. It can be downloaded from www.pa-mediapoint.press.net or
viewed at www.mediapoint.press.net or www.prnewswire.co.uk.

Company: Miles Firth, +44 (0) 1293 603451, Miles.firth at edwardsvacuum.com; Agency: Sandy Fewkes, +1-408-224-4024, sandy at mind-write.com