TSMC to Take Delivery of an ASML EUV Lithography System for Research and Development on Future Technology Generations

Agreement underscores TSMC's continuing investment in the European semiconductor community

VELDHOVEN, Netherlands and HSINCHU, Taiwan, R.O.C., February 22, 2010 - ASML Holding NV (ASML) today announced that Taiwan Semiconductor
Manufacturing Company (TWSE: 2330, NYSE: TSM) will take delivery of a
TWINSCAN NXE:3100 extreme ultra-violet (EUV) lithography system. This tool
represents one of six NXE:3100 EUV systems for ASML's worldwide partners and
customers.

TSMC is expected to be the first dedicated foundry conducting on-site EUV
development and will install the new system on its Fab 12 GigaFab(TM) for
development of future technology nodes.

EUV technology employs a much shorter wavelength and has the potential to
reduce costs associated with current techniques used to stretch 193-nm
immersion lithography, making it a promising lithography technology for
manufacturing IC's for future advanced technology nodes. TSMC is evaluating
EUV and other lithography technologies for their potential to optimize
cost-effective manufacturing at future technology nodes.

"TSMC will use a TWINSCAN NXE:3100 for research and development of future
advanced technology nodes," said Dr. Shang-yi Chiang, TSMC Senior Vice
President of Research & Development. "EUV is one of next-generation
lithography technologies we are investigating. Working with this system is in
line with our objective of maintaining advanced technology leadership. At the
same time, this agreement reinforces our historic commitment to investing in
the innovative European semiconductor community which, through ASML and
others, will play a pivotal role in our process technology development in the
future."

"With an NXE:3100 for TSMC, ASML is now providing EUV systems to all
major segments of the chip making industry: Logic, DRAM and NAND flash
memory, and Foundry," said Martin van den Brink, ASML's executive vice
president and chief product & technology officer. "We look forward to
continuing our long relationship with TSMC by providing them the best
possible technology for making the chips of tomorrow."

About TSMC

TSMC is the world's largest dedicated semiconductor foundry, providing
the industry's leading process technology and the foundry's largest portfolio
of process-proven libraries, IPs, design tools and reference flows. The
Company's managed capacity in 2009 totaled 9.96 million (8-inch equivalent)
wafers, including capacity from two advanced 12-inch GIGAFABs(TM), four
eight-inch fabs, one six-inch fab, as well as TSMC's wholly owned
subsidiaries, WaferTech and TSMC China, and its joint venture fab, SSMC. TSMC
is the first foundry to provide 40nm production capabilities. Its corporate
headquarters are in Hsinchu, Taiwan. For more information about TSMC please
visit www.tsmc.com.

About ASML

ASML is the world's leading provider of lithography systems for the
semiconductor industry, manufacturing complex machines that are critical to
the production of integrated circuits or chips. Headquartered in Veldhoven,
the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the
symbol ASML. ASML has more than 6,500 employees (expressed in full time
equivalents), serving chip manufacturers in more than 60 locations in 15
countries. More information about our company, our products and technology,
and career opportunities is available on our website: ww.asml.com

Jos Vreeker, Corporate Communications, +31-40-268-3532 - Veldhoven, the Netherlands, or Ryan Young, Corporate Communications, +1-480-383-4733 - Tempe, Arizona, or Akiko Ogasawara, Corporate Communications, +81-3-5793-1831 - Tokyo, Japan, all of ASML; or Investor Relations, Craig DeYoung, +1-480-383-4005 - Tempe, Arizona, or Franki D'Hoore, Investor Relations, +31-40-268-6494 - Veldhoven, the Netherlands, both of ASML; or TSMC Acting Spokesman, J.H. Tzeng, Deputy Director, Public Relations, +886-3-505-5028, or Michael Kramer, Senior Administrator, Public Relations, +886-3-505-6216, both of TSMC