A Leading French Research Institute is Placing its Trust in FRT

CEA-LETI in Grenoble is Purchasing a Unique Wafer Metrology Solution

BERGISCH GLADBACH, Germany, October 18, 2010 - An internationally leading research institution in the microelectronics,
information and health technology industries is relying on surface metrology
from Germany. CEA-LETI will be working with a fully automatic wafer
inspection system, the FRT MFE (Metrology For Frontend). With this tool, FRT
has developed a universal solution for the most diverse measuring tasks in
wafer manufacturing. Furthermore, the system is used for the pioneering 3D IC
connection technology.

CEA-LETI is part of the influential French research institute
"Commissariat a l'Energie Atomique et aux Energies Alternatives" (CEA)
located in Grenoble in the French Alps. An MFE system will be installed for
the high resolution characterisation of raw, structured and bonded wafers
according to SEMI standards. For 3D IC / TSV (Through Silicon Via)
measurements, the tool incorporates a new technology for measuring
particularly small TSV's with a very high aspect ratio (< 5 microm in
diameter and up to 180 microm deep). The FRT MFE system is based on the
proven MicroProf multisensor technology, which can combine diverse measuring
tasks into a single system. Using the newly acquired system, CEA-LETI will
determine parameters such as TTV (Total Thickness Variation), planarity, bow,
warp, roughness, 3D topography, film thickness as well as the ground breaking
TSV measurement capability.

FRT MicroProf: Modular multisensor metrology with a secure future

FRT multisensor metrology will be presented at SEMICON Europa between
October 19th and 21st (booth: 1.649). It is optimally prepared for the
various measuring tasks within wafer metrology. Due to modularity
construction and integration methods, FRT systems can be optimally equipped
for future upgrades. Through the combination of several measuring procedures
in a single universal tool, foot print requirements in the production fab can
be reduced to a minimum. The tools achieve a very high degree of automation
and optional wafer handling. MicroProf measuring systems are used by leading
international manufacturers and research institutes in microelectronics and
microsystems engineering as well as the photovoltaic, medical engineering,
automotive and machine building industries.

FRT live

FRT can be found at the following trade fairs:

    - testXpo, specialist trade fair for test engineering, Ulm (11th - 14th
    October 2010)

    - SEMICON Europe 2010, Dresden (19th - 21st October 2010), booth 1.649

Fries Research & Technology GmbH - the art of metrology

Fries Research & Technology GmbH (FRT) supplies 3D surface metrology for
research and production. With micro- and nanometer resolution, the
non-contact and non-destructive measuring systems which have received many
awards, measure topography, structure, step height, roughness, wear,
thickness variation, film thickness and many other parameters. More than 300
units are in use worldwide in companies from the automotive, semiconductor,
optical, solar/photovoltaic and other sectors. FRT maintains subsidiaries in
the USA, China and Switzerland as well as a sales and service network in Asia
and Europe.

    Media Contact:

    Jens Bonerz
    FRT, Fries Research & Technology GmbH
    Friedrich-Ebert-Strasse
    51429 Bergisch Gladbach
    Tel.: +49-(0)2204-842430
    E-Mail: bonerz@frt-gmbh.com
    www.frt-gmbh.com

    Dr. Oliver Schillings
    Alpha & Omega PR
    Am Muhlenberg 47
    51465 Bergisch Gladbach
    Tel.: +49-(0)2202-959002
    E-Mail: o.schillings@aopr.de
    www.aopr.de

Media Contact: Jens Bonerz, FRT, Fries Research & Technology GmbH, Friedrich-Ebert-Strasse, 51429 Bergisch Gladbach, Tel.: +49-(0)2204-842430, E-Mail: bonerz at frt-gmbh.com, www.frt-gmbh.com. Dr. Oliver Schillings, Alpha & Omega PR, Am Muhlenberg 47, 51465 Bergisch Gladbach, Tel.: +49-(0)2202-959002, E-Mail: o.schillings at aopr.de, www.aopr.de